Semiconductor Manufacturing
Function: Personnel and plant protection in chemical vapour deposition, ion implantation, metal-oxide vapour deposition, doping, laser etching and storage.
Typical Gases: HC, Cl2, HCl, HCN, SO2, PH3, SiH4, AsH3, H2, HF, O2.
Monicon detectors: CGS500, T100, S500L, T80.
Monicon controllers: Single Channel, 4 Channel, 8 Channel, Multi-Channel.